Mr. Baohua Qu Profile

Baohua Qu

at Chongqing Univ of Technology

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Proceedings Article | 13 November 2019 Paper

Error testing and compensation of the time-grating angle measurement system

Tian-heng Zhang, Yang-yang wang, Bao-hua Qu, Qi-fu Tang

Proceedings Volume 11343, 113430E (2019) https://doi.org/10.1117/12.2547246

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In order to remove the subdivide error and zero error to improve the measurement precision of time-grating displacement sensor angle measuring system, this paper proposed an error compensation method based on sparse sampling. Firstly, harmonic analysis and the error compensation model of the induction signal for time-grating sensor displacement angle measuring system is performed. Then, laser interferometer and time-grating sensor are used to synchronous sample positions at the poles and interior single-pole. Finally, the subdivide error and zero error of measurement are corrected by the compensation model. A time-grating sensor system with 72 poles are taken as subject to test, the result shows that:the peak to the peak value of the measurement error reduces from 138" to 2.69", this is to say, the accurate degree raised 51 times than before. Besides, this method provides full-circle error compensation with fully cancel the subdivide error and zero error based on sparse sampling which greatly improves the correction efficiency and measurement accuracy.

Proceedings Article | 13 November 2019 Paper

An absolute measurement method of time-grating angular displacement sensor

Bao-hua Qu, Tian-heng Zhang, Dong-lin Peng, Yang-yang Wang, Feng-jun Li

Proceedings Volume 11343, 113430D (2019) https://doi.org/10.1117/12.2547184

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Angular displacement sensor plays an indispensable role in high-precision angular measurement and position feedback. With the development of sensing technology, some traditional incremental measurement methods have been unable to meet the requirements such as anti-interference ability, lossless of power-off data information and other factors that are susceptible to environment and mechanical system changes. Therefore, this paper has proposed a method based on combined measurement for absolute measurement of time-grating angular displacement sensor, which is mainly assembling two time-grating sensors that use different pole pair in a co-prime relationship on the axis. By this method, it can build high-precision and high-resolution sensor that meets vernier-subdivision principle in the form of a combination of "fine sensor and fine sensor". The sensor model and simulation experiment results are introduced by Inventor 2016 and ANSYS Maxwell 16.0, respectively. Then, the absolute position measurement method is validated by analyzing the initial phase of the induced electromotive force of the simulation experiment results with the mathematical method. Experiment results show the absolute measurement method is feasible.

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