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Artem Babushkin
at Yaroslavl Branch of the Institute of Physics and Technology
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Publications (1)
Proceedings Article | 15 March 2019 Paper
Effect of Ar ion-plasma treatment on residual stress in thin Cr films
A. Babushkin, R. Selyukov, I. Amirov
Proceedings Volume 11022, 1102223 (2019) https://doi.org/10.1117/12.2521617
KEYWORDS: Ions, Chromium, Diffusion, Argon, Thin films, Sputter deposition, Bridges, Microelectromechanical systems, Plasma
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