Mr. Argho Das Profile

Argho Das

at imec

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Publications (2)

Proceedings Article | 31 October 2022 Poster

Deep-learning denoiser-assisted framework for robust SEM contour extraction and analysis for advanced semiconductor node

Bappaditya Dey, Sandip Halder, Argho Das, SAYANTAN DAS, STEWART WU, Germain Fenger

Proceedings Volume PC12292, PC122920Z (2022) https://doi.org/10.1117/12.2645403

KEYWORDS: Scanning electron microscopy, Semiconductors, Data modeling, Photomasks, Metrology, Calibration, Wafer-level optics, Stochastic processes, Shape analysis, Semiconducting wafers

Proceedings Article | 12 October 2021 Poster + Presentation + Paper

iN5 EUV single expose patterning evaluation for via layers

Argho Das, Victor Blanco, Sayantan Das, Nicola Kissoon, Sandip Halder, Mircea Dusa

Proceedings Volume 11854, 1185418 (2021) https://doi.org/10.1117/12.2600938

KEYWORDS: Etching, Logic, Critical dimension metrology, Inspection, Extreme ultraviolet lithography, Semiconducting wafers, Electron beam lithography, Optical lithography, Metrology, Diffractive optical elements

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