Dr. Alireza Hariri Profile

Dr. Alireza Hariri

at Univ of Toronto

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 19 January 2007 Paper

Development of a model for predicting dry stiction in microelectromechanical systems (MEMS)

A. Hariri, J. Zu, R. Ben Mrad

Proceedings Volume 6463, 64630E (2007) https://doi.org/10.1117/12.704605

KEYWORDS: Microelectromechanical systems, Data modeling, Systems modeling, Silicon, Chemical species, Reliability, Fractal analysis, Surface roughness, Refractive index, Actuators

Read Abstract +

Adhesion between micro parts, also referred to as stiction, is a major failure mode in MEMS. Undesirable stiction, which results from contact between surfaces, can severely compromise the reliability of MEMS. In this paper, a model is developed to predict the dry stiction between uncharged micro parts in MEMS. In dry stiction, the interacting surfaces are assumed to be either hydrophobic or placed in dry environment. In this condition, the van der Waals (vdW) and asperity deformation forces are dominant. Here, a model is developed for the vdW force between rough micro surfaces and the new model is combined with a newly developed multiple asperity point model for the elastic/plastic deformation of rough surfaces in contact to solve for the equilibrium condition of the forces. This, in turn, will yield the equilibrium distance between micro surfaces, using which the apparent work of adhesion can be found. The result of the theory is compared with the available experimental data from literature. The developed model can be easily used for design purpose. If the topographic data and material constants are known, the adhesion parameters can be quickly calculated using the model.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years