This article [J. Micro/Nanopattern. Mater. Metrol., 22(2) 020501 (2023) doi: 10.1117/1.JMM.22.2.020501] was originally published 18 May 2023 with several errors.

On page 3, the sentence “Hence, the $\beta$-dependence can be safely neglected and the effect of the illuminating line is almost the same as that of an illuminating point located at intersection of the dashed line and the $x$-axis in Fig. 2” has been corrected to “Hence, the $\beta$-dependence under the square root in Eq. (7) can be safely neglected and the effect of the illuminating line is almost the same as that of an illuminating point located at intersection of the dashed line and the $x$-axis in Fig. 2.”

On page 4, the following sentence contained an error in a denominator: “The most optimal outcome is obtained by setting $\sin \delta =\lambda /(2p)=\sin {\delta }_0$; one then sees that ${\varphi }_z(\sin {\delta }_0)=0$ and an image $I_i(x,z;{\delta }_0)=A^2+B^2+2AB\cos [\frac{2\pi x}{p}+({\varphi }_A-{\varphi }_B)]$ that is independent of $z$.” The expression $\frac{2\pi x}{\lambda }$ has been corrected to $\frac{2\pi x}{p}$.

The article was corrected 28 November 2023.