19 December 2023 Multiple patterning via layout decomposition method for directed self-assembly lithography
Tao Zhang, Hengyu Zhou, Shisheng Xiong, Sikun Li
Author Affiliations +
Abstract

In the sub-7 nm technology nodes, the cost of printing dense via layers increases dramatically. Directed self-assembly (DSA) (DSA) technology with multiple patterning (MP) lithography (DSA-MP) provides a high-volume manufacturing solution with a high throughput and low cost. To enable the technology, a high-quality DSA-MP-aware layout decomposer that contains DSA grouping and MP assignment is necessary. We propose a graph-based heuristic algorithm that minimizes the potential DSA decomposition violations using grouping nodes in the complete graph and the corresponding place-and-route method. Then the grouping result is modified and the MP assignment is solved simultaneously by hybrid algorithms. Experimental results show the efficiency and effectiveness of the proposed method in dealing with large dense vias patterns.

© 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
Tao Zhang, Hengyu Zhou, Shisheng Xiong, and Sikun Li "Multiple patterning via layout decomposition method for directed self-assembly lithography," Journal of Micro/Nanopatterning, Materials, and Metrology 22(4), 043001 (19 December 2023). https://doi.org/10.1117/1.JMM.22.4.043001
Received: 15 August 2023; Accepted: 4 December 2023; Published: 19 December 2023
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KEYWORDS
Directed self assembly

Lithography

Optical lithography

Electron beam lithography

Block copolymers

Mathematical optimization

Design

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