Prof. Shisheng Xiong Profile

Prof. Shisheng Xiong

at Fudan Univ

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Publications (1)

SPIE Journal Paper | 19 December 2023

Multiple patterning via layout decomposition method for directed self-assembly lithography

Tao Zhang, Hengyu Zhou, Shisheng Xiong, Sikun Li

JM3, Vol. 22, Issue 04, 043001, (December 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.043001

KEYWORDS: Directed self assembly, Lithography, Optical lithography, Electron beam lithography, Block copolymers, Mathematical optimization, Design, Printing, Manufacturing, Very large scale integration

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