Understanding the efficacy of linewidth roughness postprocessing

Chris A. Mack

doi:10.1117/1.JMM.14.3.033503

14 July 2015 Understanding the efficacy of linewidth roughness postprocessing

Chris A. Mack

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 3, 033503 (July 2015). https://doi.org/10.1117/1.JMM.14.3.033503

Abstract

Lack of progress in reducing linewidth roughness of lithographic features has led to investigations of the use of postlithography process smoothing techniques. However, it remains unclear whether such postprocessing will sufficiently reduce the detrimental effects of feature roughness. Thus, there is a need to understand the efficacy of postprocessing on not just roughness reduction, but on the negative device impacts of roughness. We derive model equations of how roughness impacts lithographic performance and incorporates smoothing using postprocessing. These models clearly show that postprocess smoothing works best by increasing the correlation length. Increasing the correlation length is very effective at reducing high-frequency roughness that impacts within-feature variations but is less effective at reducing low-frequency roughness that impacts feature-to-feature variations. It seems that postprocess smoothing is not a substitute for reducing the initial roughness of resist features.

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Chris A. Mack "Understanding the efficacy of linewidth roughness postprocessing," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(3), 033503 (14 July 2015). https://doi.org/10.1117/1.JMM.14.3.033503

Published: 14 July 2015

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