CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12009 > Article
Presentation
5 March 2022 A silicon micromechanical resonator with capacitive transduction for laser-based photoacoustic spectroscopy
Wioletta Trzpil, Diba Ayache, Roman Rousseau, Julien Charensol, Aurore Vicet, Michael Bahriz
Author Affiliations +
Proceedings Volume PC12009, Quantum Sensing and Nano Electronics and Photonics XVIII; PC120090K (2022) https://doi.org/10.1117/12.2622480
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
Quartz-enhanced photoacoustic spectroscopy (QEPAS) is one of the most efficient ways to obtain sensitive, selective, robust gas sensors, where the signal can be given with a fast response and measured continuously. The main drawback of QEPAS comes from using a quartz tuning fork (QTF) as a mechanical transducer. QTF is not designed for photoacoustic gas sensing, and its further integration is limited. We propose a silicon resonant MEMS based on a capacitive transduction mechanism with a limit of detection comparable to that of a QTF. This sensor is potentially an efficient sound wave transducer that can advantageously replace a QTF
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Wioletta Trzpil, Diba Ayache, Roman Rousseau, Julien Charensol, Aurore Vicet, and Michael Bahriz "A silicon micromechanical resonator with capacitive transduction for laser-based photoacoustic spectroscopy", Proc. SPIE PC12009, Quantum Sensing and Nano Electronics and Photonics XVIII, PC120090K (5 March 2022); https://doi.org/10.1117/12.2622480
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Photoacoustic spectroscopy
Silicon
Laser resonators
Laser spectroscopy
Microresonators
Semiconductor lasers
Sensors
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top