Ms. Wioletta Trzpil Profile

Wioletta Trzpil

at Institut d'Electronique et des Systèmes

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Publications (5)

Proceedings Article | 9 March 2022 Presentation

A capacitive resonant MOEMS on silicon for photoacoustic spectroscopy

Wioletta Trzpil, Roman Rousseau, Diba Ayache, Julien Charensol, Aurore Vicet, Michael Bahriz

Proceedings Volume PC12013, PC1201308 (2022) https://doi.org/10.1117/12.2622482

KEYWORDS: Photoacoustic spectroscopy, Silicon, Sensors, Microopto electromechanical systems, Transducers, Microelectromechanical systems, Methane, Gas sensors, Resonators, Quartz

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Proceedings Article | 5 March 2022 Presentation

Infrared spectroscopy for exhaled breath diagnosis

Diba Ayache, Wioletta Trzpil, Julien Charensol, Nicolas Maurin, Roman Rousseau, Fares Gouzi, Michael Bahriz, Aurore Vicet

Proceedings Volume PC12009, PC1200913 (2022) https://doi.org/10.1117/12.2608559

KEYWORDS: Sensors, Infrared spectroscopy, Carbon monoxide, Quartz, Gas lasers, Quantum cascade lasers, Photoacoustic spectroscopy, Oxygen, Nitrogen, New and emerging technologies

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Proceedings Article | 5 March 2022 Presentation

A silicon micromechanical resonator with capacitive transduction for laser-based photoacoustic spectroscopy

Wioletta Trzpil, Diba Ayache, Roman Rousseau, Julien Charensol, Aurore Vicet, Michael Bahriz

Proceedings Volume PC12009, PC120090K (2022) https://doi.org/10.1117/12.2622480

KEYWORDS: Photoacoustic spectroscopy, Silicon, Sensors, Semiconductor lasers, Microresonators, Laser spectroscopy, Laser resonators, Transducers, Microelectromechanical systems, Methane

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Proceedings Article | 12 September 2021 Presentation

An analytic model for cantilever optimization for photoacoustic gas sensing with capacitive transduction

Wioletta Trzpil, Roman Rousseau, Diba Ayache, Nicolas Maurin, Aurore Vicet, Michael Bahriz

Proceedings Volume 11871, 118710T (2021) https://doi.org/10.1117/12.2600116

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Gas sensing find tremendous applications in various fields like medicine, air quality, food processing or security and defence. The main challenge in industry is to create an integrated and compact sensor while maintaining its performance and power consumption. Photoacoustic spectroscopy (PAS) gains particular interest in this field due to its excellent selectivity while maintaining compactness. In tunable laser diode absorption spectroscopy (TDLS) the signal is proportional to optical path. Sensitivity in photoacoustic spectroscopy is proportional to the power of the laser, which allows to keep a good sensitivity even with small gas cells. The use of mechanical resonator with high quality factor allows improving the signal-to-noise ratio and avoid the use of an acoustic chamber. Micro-electro mechanical systems (MEMS) fabricated in silicon technology remain a reasonable choice to realize a compact and integrated sensor, including laser source and electronics. We propose a capacitive transduction method, which can be easily integrated, compact and highly sensitive. Due to the multi-physics problem, time and financial contains, a theoretical model seems to be a first step towards sensor performance improvement. We propose an analytical model for a new concept of photoacoustic gas sensing using capacitive transduction mechanism. The model was reinforced with computational methods implemented in Python programming environment. The study was carried out using silicon cantilever as a model, which brings an opportunity to obtain an analytical solution for all physical parameters. The goal of this research stands maximization of electrical signal output and signal-to-noise (SNR) ratio. Conducted study provides a solution to retrieve a cantilever dimensions and frequency for integrated compact gas sensor. Beyond optimization, the model provides a comprehensive tool to understand mechanisms of sensor working principles and therefore stands as a tool allowing a mechanical resonator to be developed with a more complex geometry and/or different transduction mechanism.

Proceedings Article | 12 September 2021 Presentation

Silicon micro-electromechanical resonator for enhanced photoacoustic gas detection

Wioletta Trzpil, Nicolas Maurin, Diba Ayache, Roman Rousseau, Aurore Vicet, Michael Bahriz

Proceedings Volume 11868, 118680D (2021) https://doi.org/10.1117/12.2600104

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