Fabrication of polymer based integrated photonic devices by maskless lithography

M. Rahlves

doi:10.1117/12.2213211

24 February 2016 Fabrication of polymer based integrated photonic devices by maskless lithography

M. Rahlves

Proceedings Volume 9745, Organic Photonic Materials and Devices XVIII; 97450D (2016) https://doi.org/10.1117/12.2213211
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We present our recent results on the fabrication of photonic devices such as single-mode and few-mode waveguides, Ycouplers as well as integrated interferometric sensor devices. The devices were created by means of a fabrication method based on maskless lithography, which allows for fabricating embedded integrated polymer elements on a scale of several square centimeters with a resolution down to one micron. We demonstrate the versatility of our approach by presenting first results on photonic structures created by maskless lithography.

Citation Download Citation

M. Rahlves "Fabrication of polymer based integrated photonic devices by maskless lithography", Proc. SPIE 9745, Organic Photonic Materials and Devices XVIII, 97450D (24 February 2016); https://doi.org/10.1117/12.2213211

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