1Massachusetts Institute of Technology (United States) 2The Univ. of Texas at Austin (United States) 3Xiamen Univ. (China) 4Chongqing Univ. (China) 5Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris-Saclay (France) 6CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
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We present recent development on integrated flexible and stretchable photonic devices. Conventional photonic devices are fabricated on rigid semiconductor or dielectric substrates and are therefore inherently incompatible with soft biological tissues. Recently, we have developed a suite of active and passive photonic devices and systems integrated on plastic substrates which can be bent, twisted, and stretched without compromising their optical performance. Key innovations are monolithic multi-material integration and advanced micro-mechanical structures co-designed with photonic devices, which enables devices with extreme mechanical flexibility and excellent optical performance.
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