Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric

Gaofa He; Zhigang Jia; So Ito; Yuki Shimizu; Wei Gao

doi:10.1117/12.2035716

10 October 2013 Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric

Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

Author Affiliations +

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891610 (2013) https://doi.org/10.1117/12.2035716
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

For measuring the surface profile of many micro-optical components which are made of non-conductive material, such as diffractive grating and Fresnel lens, with complicated shapes on their surfaces, the electrostatic force microscopy (EFM) was recommended in noncontact condition. When a bias voltage is applied between the conducting probe tip and a back electrode where a non-conducting sample was put on, an electrostatic force will be generated between the probe tip and the sample surface. The electrostatic force will change with the distance between the probe tip and the sample surface. Firstly, the relationship between the electrostatic force and the tip-sample distance was analyzed based on the dielectric polarization theory. The theoretical result shows that the electrostatic force is proportional to 1/d², where d is the distance between the probe tip and sample surface. Then, a numerical method (finite element method -FEM) was employed to calculate the electrostatic force and the result shows accordance with the theoretical method. Finally, the prototype of a scanning electrostatic force microscopy was built which is composed of a conducting probe unit with a Z scanner driven by piezoelectric actuators, a XY scanner unit for mounting the sample and back electrode and a circuit unit for detecting the frequency shift. The force curve, which shows the relationship between the electrostatic force and the tip-sample distance, was achieved by using the EFM prototype. All results demonstrated that it is feasible for using the EFM system to measure the surface profile of non-conductor.

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Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, and Wei Gao "Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891610 (10 October 2013); https://doi.org/10.1117/12.2035716

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KEYWORDS

Electrodes

Scanners

Finite element methods

Microscopy

Prototyping

Resonators

Dielectrics

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