Finite-element based electromagnetic field simulations: benchmark results for isolated structures

Sven Burger; Lin Zschiedrich; Jan Pomplun; Frank Schmidt

doi:10.1117/12.2026213

9 October 2013 Finite-element based electromagnetic field simulations: benchmark results for isolated structures

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Proceedings Volume 8880, Photomask Technology 2013; 88801Z (2013) https://doi.org/10.1117/12.2026213
Event: SPIE Photomask Technology, 2013, Monterey, California, United States

Abstract

We use a finite-element method to obtain highly converged results for a nano-optical light scattering setup with a non-periodic geometry.

Citation Download Citation

Sven Burger, Lin Zschiedrich, Jan Pomplun, and Frank Schmidt "Finite-element based electromagnetic field simulations: benchmark results for isolated structures", Proc. SPIE 8880, Photomask Technology 2013, 88801Z (9 October 2013); https://doi.org/10.1117/12.2026213

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