Laser thermoreflectance for semiconductor thin films metrology

P. Gailly; J. Hastanin; C. Duterte; Y. Hernandez; J.-B. Lecourt; A. Kupisiewicz; P.-E. Martin; K. Fleury-Frenette

doi:10.1117/12.922576

2 May 2012 Laser thermoreflectance for semiconductor thin films metrology

P. Gailly, J. Hastanin, C. Duterte, Y. Hernandez, J.-B. Lecourt, A. Kupisiewicz, P.-E. Martin, K. Fleury-Frenette

Proceedings Volume 8438, Photonics for Solar Energy Systems IV; 84381F (2012) https://doi.org/10.1117/12.922576
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We present a thermoreflectance-based metrology concept applied to compound semiconductor thin films off-line characterization in the solar cells scribing process. The presented thermoreflectance setup has been used to evaluate the thermal diffusivity of thin CdTe films and to measure eventual changes in the thermal properties of 5 μm CdTe films ablated by nano and picosecond laser pulses. The temperature response of the CdTe thin film to the nanosecond heating pulse has been numerically investigated using the finite-difference time-domain (FDTD) method. The computational and experimental results have been compared.

Citation Download Citation

P. Gailly, J. Hastanin, C. Duterte, Y. Hernandez, J.-B. Lecourt, A. Kupisiewicz, P.-E. Martin, and K. Fleury-Frenette "Laser thermoreflectance for semiconductor thin films metrology", Proc. SPIE 8438, Photonics for Solar Energy Systems IV, 84381F (2 May 2012); https://doi.org/10.1117/12.922576

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