Study of EUV mask e-beam inspection conditions for HVM

Shmoolik Mangan; C. C. Lin; Greg Hughes; Ran Brikman; Alex Goldenshtein; Vlad Kudriashov; Alon Litman; Lior Shoval; Ilan Englard

doi:10.1117/12.898854

24 January 2012 Study of EUV mask e-beam inspection conditions for HVM

Shmoolik Mangan, C. C. Lin, Greg Hughes, Ran Brikman, Alex Goldenshtein, Vlad Kudriashov, Alon Litman, Lior Shoval, Ilan Englard

Author Affiliations +

Proceedings Volume 8166, Photomask Technology 2011; 816631 (2012) https://doi.org/10.1117/12.898854
Event: SPIE Photomask Technology, 2011, Monterey, California, United States

Abstract

Extreme ultraviolet (EUV) e-beam patterned mask inspection (EBPMI) has been proposed by Applied Materials as a cost-effective solution for high volume manufacturing (HVM) in mask shops and fabs. Electron beam inspection technology is currently available for wafers. A recent publication described a successful sensitivity study of EUVs mask using a technology demonstration platform. Here we present a new study using extreme e-beam conditions to show the feasibility of using EBPMI in HVM. We examine potential changes in the reflectivity at the EUV wavelength after exposure to high e-beam currents, demonstrating that reflectivity does not change due to e-beam scanning. We therefore conclude that under the conditions tested, which include typical as well as extreme conditions, there is no evidence of mask damage.

Citation Download Citation

Shmoolik Mangan, C. C. Lin, Greg Hughes, Ran Brikman, Alex Goldenshtein, Vlad Kudriashov, Alon Litman, Lior Shoval, and Ilan Englard "Study of EUV mask e-beam inspection conditions for HVM", Proc. SPIE 8166, Photomask Technology 2011, 816631 (24 January 2012); https://doi.org/10.1117/12.898854

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available