Illuminator predictor for effective SMO solutions

Daniel G. Smith; Naonori Kita; Nobumichi Kanayamaya; Ryota Matsui; Shane R. Palmer; Tomoyuki Matsuyama; Donis G. Flagello

doi:10.1117/12.879116

22 March 2011 Illuminator predictor for effective SMO solutions

Daniel G. Smith, Naonori Kita, Nobumichi Kanayamaya, Ryota Matsui, Shane R. Palmer, Tomoyuki Matsuyama, Donis G. Flagello

Author Affiliations +

Proceedings Volume 7973, Optical Microlithography XXIV; 797309 (2011) https://doi.org/10.1117/12.879116
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Source Mask Optimization (SMO) is one of the most important techniques available for extending ArF immersion lithography¹. However, imaging with a small k1² factor (~0.3 or smaller) is very sensitive to errors in the illumination pupil². As a result, care must be taken to insure that the source solution from SMO can be produced by the real illuminator, which is subject to its own imaging constraints. One approach is to include an illuminator simulator in the SMO loop so that only realizable illumination pupils are considered during optimization. Furthermore, any illumination pupil predictor used in SMO should operate quickly compared to the imaging simulation if it is to avoid increasing the computational load.

Citation Download Citation

Daniel G. Smith, Naonori Kita, Nobumichi Kanayamaya, Ryota Matsui, Shane R. Palmer, Tomoyuki Matsuyama, and Donis G. Flagello "Illuminator predictor for effective SMO solutions", Proc. SPIE 7973, Optical Microlithography XXIV, 797309 (22 March 2011); https://doi.org/10.1117/12.879116

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