Analysis of closed fringe patterns for aspheric surface measurement

Liang Nie; Baoyuan Liu; Jun Han; Xun Yu

doi:10.1117/12.866158

16 October 2010 Analysis of closed fringe patterns for aspheric surface measurement

Liang Nie, Baoyuan Liu, Jun Han, Xun Yu

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76565K (2010) https://doi.org/10.1117/12.866158
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The closed fringe patterns analysis is difficult to handle, especially in interferometer for aspheric surface measurement. Two-dimensional fast Fourier transform (FFT) algorithm is proposed to extract interferogram phase in this paper. The principle and process of FFT method is described and the computer simulation proves its validity. Some key techniques are researched, such as the filter design and the elimination of prejudicial error. In order to eliminate the effect of the abrupt change in the wrapped phase map, the rectangular low-pass filters with different directions and image stitching technology are applied. To reduce spectral leakage, filter design and determination method of phase mutation position are discussed. The unwrapped phase distribution is got by the unweighted least-squares phase unwrapping algorithm and the error of spherical figure is derived from the fitting method of Zernike polynomials. The simulation results show that the method is up to high precision. The methods are used to treat the aspheric surface measurement in experiment. The results of processing the aspheric surface interferograms in a zone-plate interferometer indicate that the methods have achieved worthy measurement precision and have great development potential.

Citation Download Citation

Liang Nie, Baoyuan Liu, Jun Han, and Xun Yu "Analysis of closed fringe patterns for aspheric surface measurement", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76565K (16 October 2010); https://doi.org/10.1117/12.866158

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KEYWORDS

Aspheric lenses

Interferometers

Phase shift keying

Fringe analysis

Fourier transforms

Linear filtering

Image filtering

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