Research on middle and high spatial-frequency errors by discrete particles abrasion

Y. J. Wan; C. Y. Shi

doi:10.1117/12.866801

6 October 2010 Research on middle and high spatial-frequency errors by discrete particles abrasion

Y. J. Wan, C. Y. Shi

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 765511 (2010) https://doi.org/10.1117/12.866801
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Based on the researches of abrasion mechanism by abrasive particle, the mechanism of formative middle and high spatial-frequency errors by discrete abrasive particle has been studied. Studies show that the errors are shaped by particle's movement track, the effect of particle pressure's asymmetry, and so on. If the particle act as sliding abrasion on workpiece, the movement track which produce spatial-frequency errors takes on helix. Experiments which are taken with a more rigid lap to restrain the slippage abrasion show that the spatial-frequency errors can be reduced when the particles behavior rolling abrasion on work piece in polishing process. Several factors make the particle pressure asymmetric, in order to reduce the spatial-frequency errors shaped by particle pressure's asymmetry, active semi-rigid tool which can be distorted to fit to the workpiece surface figure is designed to make the particle pressure symmetrical. Experiment with semi-rigid tool is taken, which shows that it can reduce spatial-frequency errors.

Citation Download Citation

Y. J. Wan and C. Y. Shi "Research on middle and high spatial-frequency errors by discrete particles abrasion", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 765511 (6 October 2010); https://doi.org/10.1117/12.866801

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