Research on subsurface damage of glass-ceramics mirror

Ling-jie Peng; Pei-ji Guo; Xi Chen; Zi-wu Wang

doi:10.1117/12.2241624

28 October 2016 Research on subsurface damage of glass-ceramics mirror

Ling-jie Peng, Pei-ji Guo, Xi Chen, Zi-wu Wang

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96831B (2016) https://doi.org/10.1117/12.2241624
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

We discuss the depth of subsurface damage (SSD) on different processing conditions. Considering different conditions would produce different depths of SSD, this article seriously studies the depth influenced by different sizes of abrasive particles and different grinding discs. Then the depth of SSD would be detected via Three-Coordinate Measuring Machine (CMM) after traditional polishing. The target of this research is to provide some basic references for the choice of the glass-ceramics grinding machining process.

Citation Download Citation

Ling-jie Peng, Pei-ji Guo, Xi Chen, and Zi-wu Wang "Research on subsurface damage of glass-ceramics mirror", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831B (28 October 2016); https://doi.org/10.1117/12.2241624

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