Wave field transformation at coherent imaging of a tilted reflection mask

Igor A. Artyukov; Alexei V. Popov; Alexander V. Vinogradov

doi:10.1117/12.825929

28 September 2009 Wave field transformation at coherent imaging of a tilted reflection mask

Igor A. Artyukov, Alexei V. Popov, Alexander V. Vinogradov

Proceedings Volume 7451, Soft X-Ray Lasers and Applications VIII; 745114 (2009) https://doi.org/10.1117/12.825929
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

The coherent beam wave field transformation is considered in the case of slanting illumination of a reflection mask. The parabolic wave equation is used to find the resulting field evolution in free space and after transmission by an ideal lens. Possible applications are lensless imaging, coherent X-ray diffraction imaging (CXDI), X-ray optics and X-ray laser based lithography and reflection microscopy, and high resolution X-ray topography.

Citation Download Citation

Igor A. Artyukov, Alexei V. Popov, and Alexander V. Vinogradov "Wave field transformation at coherent imaging of a tilted reflection mask", Proc. SPIE 7451, Soft X-Ray Lasers and Applications VIII, 745114 (28 September 2009); https://doi.org/10.1117/12.825929

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