Quantitative measurement of the molecular-mass distribution in calix[4]resorcinarene molecular glass resists by mass spectrometry

W. E. Wallace; K. M. Flynn; C. M. Guttman; D. L. VanderHart; V. M. Prabhu; A. De Silva; N. M. Felix; C. K. Ober

doi:10.1117/12.813680

1 April 2009 Quantitative measurement of the molecular-mass distribution in calix[4]resorcinarene molecular glass resists by mass spectrometry

W. E. Wallace, K. M. Flynn, C. M. Guttman, D. L. VanderHart, V. M. Prabhu, A. De Silva, N. M. Felix, C. K. Ober

Author Affiliations +

Proceedings Volume 7273, Advances in Resist Materials and Processing Technology XXVI; 72732L (2009) https://doi.org/10.1117/12.813680
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

The polydispersity in the degree of functionalization for two calix[4]resorcinarenes was determined by measuring, quantitatively, their molecular mass distribution with matrix-assisted laser desorption/ionization time of flight mass spectrometry. A mathematical method for polydisperse materials is described that creates a calibration curve to correct the ion intensities in the mass spectrum to give a more reliable molecular mass distribution. One calix[4]resorcinarene was found to give accurate molecular mass distributions with little correction, while another having a very similar molecular structure was found to exhibit strong over counting of the oligomers having a high degree of functionalization.

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W. E. Wallace, K. M. Flynn, C. M. Guttman, D. L. VanderHart, V. M. Prabhu, A. De Silva, N. M. Felix, and C. K. Ober "Quantitative measurement of the molecular-mass distribution in calix[4]resorcinarene molecular glass resists by mass spectrometry", Proc. SPIE 7273, Advances in Resist Materials and Processing Technology XXVI, 72732L (1 April 2009); https://doi.org/10.1117/12.813680

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