Optical Metrology In Length And Mechanical Standards

G. D. Chapman

doi:10.1117/12.938620

25 November 1986 Optical Metrology In Length And Mechanical Standards

G. D. Chapman

Author Affiliations +

Proceedings Volume 0661, Optical Testing and Metrology; (1986) https://doi.org/10.1117/12.938620
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

A review is presented of the introduction and development of optical techniques and devices in the broad area of metrology in length and mechanical standards. Emphasis is placed upon those techniques which have been made possible by the use of lasers, or which have substantially increased accuracy and reduced work loads on a routine basis. In particular, the use of optical fourier transform techniques in metrology applied to disciplines as diverse as standards, engineering, plasma physics, and biology are explored.

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G. D. Chapman "Optical Metrology In Length And Mechanical Standards", Proc. SPIE 0661, Optical Testing and Metrology, (25 November 1986); https://doi.org/10.1117/12.938620

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