Development of high-precision laser heterodyne metrology gauges

Feng Zhao

doi:10.1117/12.569844

14 February 2005 Development of high-precision laser heterodyne metrology gauges

Feng Zhao

Proceedings Volume 5634, Advanced Sensor Systems and Applications II; (2005) https://doi.org/10.1117/12.569844
Event: Photonics Asia, 2004, Beijing, China

Abstract

Laser interferometers with better than10 picometer (pm) accuracy in displacement measurement and 1-3 microns in absolute distance ranging accuracy are sought in several of NASA's planned missions, such as the Space Interferometry Mission (SIM) and Terrestrial Planet Finder (TPF). Over the past several years, we have made significant progress at JPL toward a laser heterodyne interferometer system that can provide both picometer displacement measurement and micron level absolute distance measurement. This paper presents an review on the development of high precision metrology gauges for these missions.

Citation Download Citation

Feng Zhao "Development of high-precision laser heterodyne metrology gauges", Proc. SPIE 5634, Advanced Sensor Systems and Applications II, (14 February 2005); https://doi.org/10.1117/12.569844

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