Improved homodyne laser interferometer used in micro-vibration analysis

T. Guo; J. P. Chen; D. Dontsov; X. Fu; X. T. Hu; G. Jäger

doi:10.1117/12.676885

19 May 2006 Improved homodyne laser interferometer used in micro-vibration analysis

T. Guo, J. P. Chen, D. Dontsov, X. Fu, X. T. Hu, G. Jäger

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61502A (2006) https://doi.org/10.1117/12.676885
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

The use of homodyne interferometers has been limited to vibration measurements at objects with high surface reflectivity. This paper presents the modification of a homodyne Michelson laser interferometer that has been designed for vibration analysis at objects with industrial rough surfaces. High linearity, wide measurement range and low measurement uncertainty are the main features of this system. Experiments on an atomic force microscope (AFM) demonstrate the capability of the system.

Citation Download Citation

T. Guo, J. P. Chen, D. Dontsov, X. Fu, X. T. Hu, and G. Jäger "Improved homodyne laser interferometer used in micro-vibration analysis", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502A (19 May 2006); https://doi.org/10.1117/12.676885

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