Novel acid-free cleaning process for mask blanks

Harald Koster; Karsten Branz; Uwe Dietze; Peter Dress; Guenter Hess

doi:10.1117/12.617115

28 June 2005 Novel acid-free cleaning process for mask blanks

Harald Koster, Karsten Branz, Uwe Dietze, Peter Dress, Guenter Hess

Proceedings Volume 5853, Photomask and Next-Generation Lithography Mask Technology XII; (2005) https://doi.org/10.1117/12.617115
Event: Photomask and Next Generation Lithography Mask Technology XII, 2005, Yokohama, Japan

Abstract

Knowledge of particle removal during the mask cleaning was transferred to the blank cleaning and vice versa. The experiments are focusing on a variety of blank substrates (glass substrates, chrome on glass blanks and phase shift mask blanks substrates). The principal equipment concept and the process optimization strategies for cleaning of those different kinds of blank substrates are presented. With a fixed process flow, including UV-treatment, Fulljet and MegaSonic treatment, Rinse and Dry, process parameters are varied to define the optimum process conditions. Criteria for an optimum process are particle removal efficiency in general and optical integrity for phase shift mask blanks in particular. The particle removal efficiency for all investigated blank types is within a range of 96-100%. Especially for Ta/SiO₂ phase shift mask blanks we demonstrate that during the cleaning process the optical properties only change by 0.07° phase loss and 0.01% transmission loss per cleaning cycle, respectively.

Citation Download Citation

Harald Koster, Karsten Branz, Uwe Dietze, Peter Dress, and Guenter Hess "Novel acid-free cleaning process for mask blanks", Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); https://doi.org/10.1117/12.617115

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available