Digital holographic microscope for thermal characterization of silicon microhotplates for gas sensor

Giuseppe Coppola; Sergio De Nicola; Pietro Ferraro; Andrea Finizio; Piera Maccagnani; Giovanni Pierattini

doi:10.1117/12.546016

17 August 2004 Digital holographic microscope for thermal characterization of silicon microhotplates for gas sensor

Giuseppe Coppola, Sergio De Nicola, Pietro Ferraro, Andrea Finizio, Piera Maccagnani, Giovanni Pierattini

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.546016
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Digital Holographic Microscope has been employed to obtain an accurate characterization of a micro-hotplate for gas sensing applications. The fabrication of these sensors needs different materials, with different properties and different technological processes, which involve high temperature treatments. Consequently, the structure is affected by the presence of residual stresses, appearing in form of undesired bowing of the membrane. Moreover, when the temperature of the sensor increases, a further warpage of the structure is observed. DHM allows to evaluate, with high accuracy, deformations due to the residual stress and how these deformations are affected by thermal loads. In particular, profiles of the structure have been evaluated both in quasi-static condition and the profile variation due to the biasing of the heater resistor has been measured.

Citation Download Citation

Giuseppe Coppola, Sergio De Nicola, Pietro Ferraro, Andrea Finizio, Piera Maccagnani, and Giovanni Pierattini "Digital holographic microscope for thermal characterization of silicon microhotplates for gas sensor", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.546016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available