Challenges in the development of precise positioning systems for MEMS/nanotechnology

Shao Zhao; Kok Kiong Tan

doi:10.1117/12.548710

2 April 2004 Challenges in the development of precise positioning systems for MEMS/nanotechnology

Shao Zhao, Kok Kiong Tan

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.548710
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

In this paper, the development of an integrated and open-architecture precision motion control system is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper.

Citation Download Citation

Shao Zhao and Kok Kiong Tan "Challenges in the development of precise positioning systems for MEMS/nanotechnology", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.548710

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