Paper
16 January 2003 Reciprocating silicon microtribometer
Philippe Dubois, Stephane von Gunten, August Enzler, Urs Lippuner, Alex Dommann, Nicolaas-F. de Rooij
Author Affiliations +
Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.478200
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
The microtribometer fabricated is designed to observe the wear of removable flat silicon test inserts, coated with thin film layers such as DLC and moving in an oscillating manner relatively to each other. For observing the low wear of DLC layers in a reasonable amount of time, high oscillating speed is essential and can be achieved by reducing the mass in motion. The silicon microtribometer reaches oscillating frequencies of 10 Hz while applying a normal force on the test inserts up to 9.6 N, the maximal displacement amplitude being 1.5 mm. The two silicon main parts of the microtribometer guide test inserts along one direction in a back and forth motion while avoiding any side friction, the actuation being done by an external linear motor. For such application crystalline silicon presents, compare to other materials, the advantage of the invariance of its behavior over time.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe Dubois, Stephane von Gunten, August Enzler, Urs Lippuner, Alex Dommann, and Nicolaas-F. de Rooij "Reciprocating silicon microtribometer", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.478200
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KEYWORDS
Silicon

Finite element methods

Optical simulations

Aluminum

Deep reactive ion etching

Semiconducting wafers

Silicon films

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