Pressure sensor based on a microstructure with dual silicon nitride vibrating beams

Deyong Chen; Dafu Cui; Li Wang; Xiaotong Gao; Zhaoyan Fan

doi:10.1117/12.469410

14 November 2002 Pressure sensor based on a microstructure with dual silicon nitride vibrating beams

Deyong Chen, Dafu Cui, Li Wang, Xiaotong Gao, Zhaoyan Fan

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.469410
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper describes a resonant pressure sensor of a new structure which comprises two beams supported by only two rectangular piers. Both beams can be thermally excited into resonant vibration, whose resonant frequencies are differentially modulated by pressure loads, and the value of the applied pressure can then be obtained by measuring the resonant frequency of each beam. With thick silicon rich SiN film of low residual stress as mechanical vibrating beams, the sensor is fabricated from a single crystal silicon wafer, using porous silicon as a sacrificial layer. Computer simulation is carried out on temperature distribution, resonant frequency shift due to thermal stress, design of diaphragm geometry, and sensitivity of pressure measurement. Simulation results show that the novel structure improves the thermal stability and pressure sensitivity.

Citation Download Citation

Deyong Chen, Dafu Cui, Li Wang, Xiaotong Gao, and Zhaoyan Fan "Pressure sensor based on a microstructure with dual silicon nitride vibrating beams", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469410

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