Study of titanium-carbon gradient layers grown by combination of laser deposition and magnetron sputtering

Miroslav Jelinek; Jaromir Kadlec; Tomas Kocourek; Petr Bohac

doi:10.1117/12.482904

12 September 2002 Study of titanium-carbon gradient layers grown by combination of laser deposition and magnetron sputtering

Miroslav Jelinek, Jaromir Kadlec, Tomas Kocourek, Petr Bohac

Author Affiliations +

Proceedings Volume 4915, Lasers in Material Processing and Manufacturing; (2002) https://doi.org/10.1117/12.482904
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Gradient titanium- carbon films were grown by hybrid deposition arrangement combining laser deposition and DC magnetron sputtering. Laser was used for deposition of carbon films and magnetron simultaneously sputtered Ti on the same substrate. Depth profile of carbon and nitrogen species, films adhesion and microhardness are studied in connection with deposition conditions.

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Miroslav Jelinek, Jaromir Kadlec, Tomas Kocourek, and Petr Bohac "Study of titanium-carbon gradient layers grown by combination of laser deposition and magnetron sputtering", Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); https://doi.org/10.1117/12.482904

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