Effect of annealing tmeperature on physical properties of thin epitaxial PZT films on STO/Si substrates

Steven M. Smith; A. A. Talin; Steven Voight; Andy Hooper; Diana Convey

doi:10.1117/12.453551

23 October 2002 Effect of annealing temperature on physical properties of thin epitaxial PZT films on STO/Si substrates

Steven M. Smith, A. A. Talin, Steven Voight, Andy Hooper, Diana Convey

Proceedings Volume 4804, Sol-Gel Optics VI; (2002) https://doi.org/10.1117/12.453551
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

In this work, we report the effect of annealing temperature on the properties of epitaxial PbZr_0.52Ti_0.48O₃ (PZT) films deposited using sol-gel techniques on (001) Si substrates with a thin, epitaxial SrTiO₃ (STO) interlayer. The STO is grown on silicon using molecular beam epitaxy (MBE) and acts as the template for PZT growth. We report the values for stress, density, thickness, and refractive index vs. anneal temperatures for a thin PZT film. AFM surface roughness values of less than 0.4 nm are typical for this film. XRD patterns show the film to be c-axis orientated, with PHI scans demonstrating that the [100] PZT is orientated along the [110] Si direction. SEM cross-sections show the film morphology is free of gain boundaries and are clear of interfacial layers from the multiple spin/bake/anneal deposition technique, thereby making this material an excellent candidate for electro-optic applications.

Citation Download Citation

Steven M. Smith, A. A. Talin, Steven Voight, Andy Hooper, and Diana Convey "Effect of annealing temperature on physical properties of thin epitaxial PZT films on STO/Si substrates", Proc. SPIE 4804, Sol-Gel Optics VI, (23 October 2002); https://doi.org/10.1117/12.453551

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available