Multichannel 3D profilometry

Chongxiang Li; Anand Krishna Asundi; Zhong Ping Fang

doi:10.1117/12.447340

30 October 2001 Multichannel 3D profilometry

Chongxiang Li, Anand Krishna Asundi, Zhong Ping Fang

Proceedings Volume 4596, Advanced Photonic Sensors and Applications II; (2001) https://doi.org/10.1117/12.447340
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

With the increasing demand for micro-products and bioengineering research, resolutions of profiles with micrometer or even nanometer scale are becoming commonplace. In addition development of large integrated manufacturing systems and the real time life science growth and adaptation need high-speed display and real-time inspection. Single point measurement is time consuming method with large area profile and micrometer resolution. Thus there is a need for a fast 3-D measurement system with high resolution. This paper presents a short overview among optical 3-D shape measurement techniques, and concentrates on the confocal method. Based on the properties analysis, a novel multi-channel 3-D topography measurement system was proposed. The feasibility and the construction of system were described A unique new structure of fiber coupled confocal system is put forth to solve present problems confronted in confocal system. This system can meet the current demand of high resolution and fast 3-D measurement.

Citation Download Citation

Chongxiang Li, Anand Krishna Asundi, and Zhong Ping Fang "Multichannel 3D profilometry", Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); https://doi.org/10.1117/12.447340

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