Surface acoustic wave hydrogen sensor with a multilayer structure: preliminary results

Wieslaw P. Jakubik; Marian W. Urbanczyk; Marcin Nadolski

doi:10.1117/12.447610

6 November 2001 Surface acoustic wave hydrogen sensor with a multilayer structure: preliminary results

Wieslaw P. Jakubik, Marian W. Urbanczyk, Marcin Nadolski

Proceedings Volume 4514, Acousto-Optics and Applications IV; (2001) https://doi.org/10.1117/12.447610
Event: Acousto-Optics and Applications IV, 2001, Gdansk-Jurata, Poland

Abstract

Preliminary results concerning a hydrogen sensor based on a multilayer structure in a Surface Acoustic Wave dual-delay line system are presented. The sensor material consists of two layers performed in two different vapor deposition processes. The first one is a 720 nm CuPc layer, the other one -- a 20 nm thin palladium film. This structure was formed in a one of the dual-delay line system on a LiNbO₃ Y-cut Z-propagation substrate. In such a multilayer structure can detect hydrogen in a medium concentration range (from 0.25% to 3% in nitrogen), even at room temperature. The sensor has a very good sensitivity, stability and is entirely reversible. The response and recovery times are very short (approximately 200 s - 800 s), which is very important from the practical point of view.

Citation Download Citation

Wieslaw P. Jakubik, Marian W. Urbanczyk, and Marcin Nadolski "Surface acoustic wave hydrogen sensor with a multilayer structure: preliminary results", Proc. SPIE 4514, Acousto-Optics and Applications IV, (6 November 2001); https://doi.org/10.1117/12.447610

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