Preliminary results concerning a hydrogen sensor based on a multilayer structure in a Surface Acoustic Wave dual-delay line system are presented. The sensor material consists of two layers performed in two different vapor deposition processes. The first one is a 720 nm CuPc layer, the other one -- a 20 nm thin palladium film. This structure was formed in a one of the dual-delay line system on a LiNbO3 Y-cut Z-propagation substrate. In such a multilayer structure can detect hydrogen in a medium concentration range (from 0.25% to 3% in nitrogen), even at room temperature. The sensor has a very good sensitivity, stability and is entirely reversible. The response and recovery times are very short (approximately 200 s - 800 s), which is very important from the practical point of view.
Among the new methods of gas detection are those based on the use of a Surface Acoustic Waves in a layer structures. In such structures a chemically active layer can be a macromolecular compound--for instance: Copper Phthalocyanine (CuPc). In this paper are shown the results of the interaction investigations of a selected gas group with a CuPc layer. A linear dependence has been observed between the concentration of NO2 molecules in the air and the output signal of the device.
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