Optical properties of ZnSe diffractive optical elements for spot array generation

Keiji Ebata; Keiji Fuse; Kenichi Kurisu; Takeshi Okada; Takayuki Hirai; Hirokuni Nanba

doi:10.1117/12.451294

21 December 2001 Optical properties of ZnSe diffractive optical elements for spot array generation

Keiji Ebata, Keiji Fuse, Kenichi Kurisu, Takeshi Okada, Takayuki Hirai, Hirokuni Nanba

Proceedings Volume 4436, Wave-Optical Systems Engineering; (2001) https://doi.org/10.1117/12.451294
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We have developed a new design of advanced optics for processing high-power laser material. We introduce the concept of DOE (Diffractive Optical Elements) for high power CO₂ lasers ((lambda) =10.6micrometers ). The superior functionality of DOE means that it could become the new standard in optics for next generation devices. Here we describe the design of our DOE technology using scalar theory and micro fabrication using photolithography and RIE (Reactive Ion Etching). We also present results of our ZnSe-DOE technology, mainly focusing on a novel spot-array generator.

Citation Download Citation

Keiji Ebata, Keiji Fuse, Kenichi Kurisu, Takeshi Okada, Takayuki Hirai, and Hirokuni Nanba "Optical properties of ZnSe diffractive optical elements for spot array generation", Proc. SPIE 4436, Wave-Optical Systems Engineering, (21 December 2001); https://doi.org/10.1117/12.451294

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