Scaling-up a liquid water jet laser plasma source to high average power for extreme-ultraviolet lithography

Ulrich Vogt; Holger Stiel; Ingo Will; Marek Wieland; Thomas Wilhein; Peter Viktor Nickles; Wolfgang Sandner

doi:10.1117/12.436685

20 August 2001 Scaling-up a liquid water jet laser plasma source to high average power for extreme-ultraviolet lithography

Ulrich Vogt, Holger Stiel, Ingo Will, Marek Wieland, Thomas Wilhein, Peter Viktor Nickles, Wolfgang Sandner

Author Affiliations +

Proceedings Volume 4343, Emerging Lithographic Technologies V; (2001) https://doi.org/10.1117/12.436685
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

In this article we describe a laser plasma source for Extreme Ultraviolet Lithography (EUVL) based on a liquid water jet target. Although jet targets are known for some time now, no attempts have been made to prove the functionality of the target under conditions similar to an EUVL production-line facility, that means illumination with high average power laser systems (in the multi-kW regime) at repetition rates in the kHz region. Such systems are currently under development. We used the MBI-burst laser to simulate these extreme illumination conditions. We examined the hydrodynamic stability of the target as a function of the laser repetition rate at different average laser powers (0.6kW and 5kW per burst). Additionally, the dependence of the conversion efficiency on pulse duration in the range from 30ps to 3ns was investigated. From our results one can conclude parameters for future design of driver lasers for EUVL systems.

Citation Download Citation

Ulrich Vogt, Holger Stiel, Ingo Will, Marek Wieland, Thomas Wilhein, Peter Viktor Nickles, and Wolfgang Sandner "Scaling-up a liquid water jet laser plasma source to high average power for extreme-ultraviolet lithography", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); https://doi.org/10.1117/12.436685

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