Influence of some physical parameters on sol-gel-derived TiO2 thin films

S. M. Attia; Jue Wang; Jun Shen; Guangming Wu; Qinyuan Zhang; Zhenquan Lai; Tianhe Yang

doi:10.1117/12.408389

29 November 2000 Influence of some physical parameters on sol-gel-derived TiO₂ thin films

S. M. Attia, Jue Wang, Jun Shen, Guangming Wu, Qinyuan Zhang, Zhenquan Lai, Tianhe Yang

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408389
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

We present some physical parameters that affect the deposition of TiO₂ films by the sol-gel method. A set of solutions with different TiO₂ concentrations has been prepared. After synthesis of a set of TiO₂ films by spin coating at different spinning speeds, the films were annealed at different temperatures. The viscosities of the start solutions were measured by a viscometer. The thickness of the films and their refractive index were measured by a monochromatic ellipsometer. The results showed that the thickness is decreasing exponentially with increasing spinning speed and decreasing linearly with temperature according to the relation d(nm) equals 104 - 0.125 T( degree(s)C) + 322e^-S/900. The thickness of the films ranges from 56 to 129 nm. The refractive index is decreasing with the spinning speed and increasing with the temperature according to the relation n equals 1.791 + 6.107X10^-4T( degree(s)C) + 1.733e^-S/600. The refractive index of the prepared films ranges from 1.89 to 2.125 depending on annealing temperature and spinning speed. The viscosity of the start solutions increased with increasing the TiO₂ concentration and the aging time. One week, after preparing the solutions the viscosity was found to be in the range of 1.4 to 4.4 mPa.s depending on the concentrations.

Citation Download Citation

S. M. Attia, Jue Wang, Jun Shen, Guangming Wu, Qinyuan Zhang, Zhenquan Lai, and Tianhe Yang "Influence of some physical parameters on sol-gel-derived TiO₂ thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408389

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