Characterization of multilayer depositions of DVD-RAM disks

Walter P. Hofmann; Gian Anton Zardini; Daniel Bernegger

doi:10.1117/12.371153

30 November 1999 Characterization of multilayer depositions of DVD-RAM disks

Walter P. Hofmann, Gian Anton Zardini, Daniel Bernegger

Proceedings Volume 3806, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks; (1999) https://doi.org/10.1117/12.371153
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A method for rapid characterization of DVD multilayer depositions is presented. With a single optical measurement the devised method allows to determine the values of the refractive index (n) and of the extinction coefficient (k) for the wavelength comprised between 400 and 900 nm, and the film thickness. The analysis of these optical and physical properties provides a mean for tracking back possible process deviations in the multilayer sputtering of the DVD-RAM disks.

Citation Download Citation

Walter P. Hofmann, Gian Anton Zardini, and Daniel Bernegger "Characterization of multilayer depositions of DVD-RAM disks", Proc. SPIE 3806, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, (30 November 1999); https://doi.org/10.1117/12.371153

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