Innovations in monitoring for sub-half-micron production

Teresa L. Lauck; Kristin Wiley

doi:10.1117/12.275957

7 July 1997 Innovations in monitoring for sub-half-micron production

Teresa L. Lauck, Kristin Wiley

Proceedings Volume 3050, Metrology, Inspection, and Process Control for Microlithography XI; (1997) https://doi.org/10.1117/12.275957
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

As wafer substrates increase to 200 mm and critical dimensions decrease below half micron, defect density control becomes more critical. Defects must be monitored and minimized in a timely manner in order to maintain profitability. In addition, as the number of masking layers increases, so do the cycles through the photolithography cells that also highlights the need for improved imaging quality. The best case scenario would be to monitor imaging integrity prior to committing production wafers. One of the greatest stimulators for innovation can be information. Such was the case for us, when we received a new KLA 2132 that allowed us to inspect a higher percentage of the patterend surface within a wafer. The innovation discussed in this paper is the process of combining several individual non-production monitors into one comprehensive test monitor. This one new monitor inspected by KLA has provided better information on photo cell integrity then previously available. This non-production monitor allows us to guarantee the quality of the photo imaging cell prior to committing production materials. The use of this new comprehensive test monitor has enabled us to improve imaging quality and reduce rework rates without a significant impact to production uptime.

Citation Download Citation

Teresa L. Lauck and Kristin Wiley "Innovations in monitoring for sub-half-micron production", Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); https://doi.org/10.1117/12.275957

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available