Micromachined aperture probe tip for multifunctional scanning probe microscopy

Michael Abraham; Wolfgang Ehrfeld; Manfred Lacher; Karsten Mayr; Wilfried Noell; Peter Guethner; Joachim Barenz

doi:10.1117/12.271226

15 April 1997 Micromachined aperture probe tip for multifunctional scanning probe microscopy

Michael Abraham, Wolfgang Ehrfeld, Manfred Lacher, Karsten Mayr, Wilfried Noell, Peter Guethner, Joachim Barenz

Proceedings Volume 3009, Micromachining and Imaging; (1997) https://doi.org/10.1117/12.271226
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near field optical microscopy. The sensor consists of a microfabricated cantilever with an integrated waveguide and a transparent near field aperture tip. The advantage compare to the fiber based near field tips is the high reproducibility of the aperture and the control of the tip-sample distance by the AFM-channel. The key process consists in a novel micromachined aperture tip. The aperture tip is fabricated in a reliable batch process which has the potential for implementation in micromachining processes of scanning probe microscopy sensors and therefore leads to new types of multifunctional probes. For evaluation purposes, the tip was attached to an optical fiber by a microassembly setup and subsequently installed in a near-field scanning optical microscopy. First measurements of topographical and optical near-field patterns demonstrate the proper performance of the hybrid probe.

Citation Download Citation

Michael Abraham, Wolfgang Ehrfeld, Manfred Lacher, Karsten Mayr, Wilfried Noell, Peter Guethner, and Joachim Barenz "Micromachined aperture probe tip for multifunctional scanning probe microscopy", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271226

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