Near-field optical mapping using cantilevered nanoscopic Schottky diode tips

Bjoern Rosner; Toralf Bork; Vivek Agrawal; Pavel Neuzil; Daniel W. van der Weide

doi:10.1117/12.449530

5 December 2001 Near-field optical mapping using cantilevered nanoscopic Schottky diode tips

Bjoern Rosner, Toralf Bork, Vivek Agrawal, Pavel Neuzil, Daniel W. van der Weide

Proceedings Volume 4456, Controlling and Using Light in Nanometric Domains; (2001) https://doi.org/10.1117/12.449530
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We report on the application as well as microfabrication process of batch-fabricated optical near-field sensors using cantilevered scanning force microscopy tips. The process includes implementation of a coaxial conductive geometry into a silicon sensor tip, along with electrical connections on the cantilever and chip body. The coaxial guide structure is used as electric lead to a sub-micron Schottky photodetector at the end of the tip, formed at the junction of the protruding silicon core and a recessed aluminum coating. The I-V curves of these sensors are consistent with numerical studies for such constricted geometries. Optical near-field data gathered by this sensor in topography-following mode is presented.

Citation Download Citation

Bjoern Rosner, Toralf Bork, Vivek Agrawal, Pavel Neuzil, and Daniel W. van der Weide "Near-field optical mapping using cantilevered nanoscopic Schottky diode tips", Proc. SPIE 4456, Controlling and Using Light in Nanometric Domains, (5 December 2001); https://doi.org/10.1117/12.449530

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