Carbon super tips on AFM probes as near-field PSTM sensors

Michel Castagne; M. Benfedda; S. Lahimer; Jean-Pierre Fillard; L. Grimont

doi:10.1117/12.248511

26 August 1996 Carbon super tips on AFM probes as near-field PSTM sensors

Michel Castagne, M. Benfedda, S. Lahimer, Jean-Pierre Fillard, L. Grimont

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248511
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

It has now been widely established that AFM probes (silicon as well as silicon nitride) are relaxant devices for the conversion of near field evanescent waves into far field propagating photons. From several points of view these probes seem to be more convenient than the usual tapered optical fibers which makes the tip a really mesoscopic object. Also simultaneous atomic force microscopy (AFM) or shear force microscopy (SFM) topographic images can be acquired containing meaningful information. In this paper we describe consistent experimental results on the capture of the evanescent wave by such probes which have been equipped with a carbon 'super tip' in order for them to attain higher resolution performances especially on the rugged surfaces of semiconductor processed devices. The experiments are performed on an indium phosphide surface in a PSTM configuration at lambda equals 1.06 micrometer. The intensity versus distance curves obey the classical model of optical conversion in spite of the very sharp aspect of the tip. It is also shown that the guiding properties of the super tips leads to a narrower beam output. The capture mechanism involved is discussed.

Citation Download Citation

Michel Castagne, M. Benfedda, S. Lahimer, Jean-Pierre Fillard, and L. Grimont "Carbon super tips on AFM probes as near-field PSTM sensors", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248511

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KEYWORDS

Atomic force microscopy

Silicon

Carbon

Near field

Near field optics

Photons

Control systems

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