Self-learning intellectual system of expert diagnostics of technological malfunctions in ULSI manufacturing

Peter A. Arutyunov; Mikhail G. Kuznetsov

doi:10.1117/12.221315

19 September 1995 Self-learning intellectual system of expert diagnostics of technological malfunctions in ULSI manufacturing

Peter A. Arutyunov, Mikhail G. Kuznetsov

Author Affiliations +

Proceedings Volume 2637, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing; (1995) https://doi.org/10.1117/12.221315
Event: Microelectronic Manufacturing '95, 1995, Austin, TX, United States

Abstract

The field of Information Intellectual System (IIS) application in technology spreads over solving problems, that cannot be easily formalized and that are connected with the diagnostics and quality control of ULSI. One of the main tasks of IIS in the technology of Microelectronics is the precedent search. Another task no less serious is to mathematically process technological experience using information coded array. The purpose of it is, firstly, to establish interrelation between symptomatic and failures and, secondly, to choose an optimal plan of rehabilitation of the technological process and the crystal. The paper describes the basic concepts and principles of software and mathematical software development for computer system of expert diagnostics of technological malfunctions in ULSI manufacturing. The system includes: data base (DB), knowledge base (KB), and subsystems (of precedent search, expert diagnostics and consultations on rehabilitation). DB and KB contain information of defects. The research prototype of this system was realized on IBM PC^3.5.

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Peter A. Arutyunov and Mikhail G. Kuznetsov "Self-learning intellectual system of expert diagnostics of technological malfunctions in ULSI manufacturing", Proc. SPIE 2637, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing, (19 September 1995); https://doi.org/10.1117/12.221315

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