Manufacturing performance of the ALTA 3000 mask laser writer

Brian J. Grenon; D. C. Defibaugh; Donna M. Sprout; C. J. Taft

doi:10.1117/12.228180

8 December 1995 Manufacturing performance of the ALTA 3000 mask laser writer

Brian J. Grenon, D. C. Defibaugh, Donna M. Sprout, C. J. Taft

Proceedings Volume 2621, 15th Annual BACUS Symposium on Photomask Technology and Management; (1995) https://doi.org/10.1117/12.228180
Event: 15th Annual BACUS Symposium on Photomask Technology and Management '95, 1995, Santa Clara, CA, United States

Abstract

This paper describes the manufacturing performance of the ALTA 3000 laser writer at the IBM mask fabrication facility in Essex Junction, Vermont. Current mask parametric performance for feature size control (x-bar and 3-sigma), registration and defect density of 4x and 5x reticles is presented. In addition, reliability data and write-time data for typical 64 Mb and 256 Mb reticles are provided.

Citation Download Citation

Brian J. Grenon, D. C. Defibaugh, Donna M. Sprout, and C. J. Taft "Manufacturing performance of the ALTA 3000 mask laser writer", Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); https://doi.org/10.1117/12.228180

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