Paper
3 June 1994 PLZT/ITO grating for optical switching and reconfigurable optical interconnect applications
Joanne H. Maurice, Pierre Joseph Talbot
Author Affiliations +
Abstract
A 2D optoelectronic diffraction grating based on PLZT ceramic material for optical switching and reconfigurable optical interconnect applications is demonstrated. Integrable chips are fabricated consisting of numerous fine interleaved transparent indium-tin oxide electrodes on a polycrystalline PLZT ceramic substrate. The chips measure one centimeter square. Electrode features are scales and measure from 12.5 micrometers to 100 micrometers . Reported here are chip material and fabrication details.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joanne H. Maurice and Pierre Joseph Talbot "PLZT/ITO grating for optical switching and reconfigurable optical interconnect applications", Proc. SPIE 2216, Photonics at the Air Force Photonics Center, (3 June 1994); https://doi.org/10.1117/12.177331
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Electro optics

Semiconducting wafers

Electrodes

Photomasks

Ceramics

Lithography

Optical interconnects

Back to Top