Infrared multiwavelength He-Ne laser absolute-distance interferometer for diameter measurement of large-scale workpiece

Zheng You; WeiMing Ren; Jinwen Liang

doi:10.1117/12.156262

22 September 1993 Infrared multiwavelength He-Ne laser absolute distance interferometer for diameter measurement of large scale workpiece

Zheng You, WeiMing Ren, Jinwen Liang

Author Affiliations +

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156262
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

This paper describes a new type multiwavelength HeNe laser interferometer for diameter measurement of large scale work piece. The laser can oscillate on two wavelength 3. 39l2i and 3. 3922pm simultaneously. By switching between two equal intensity state it provides a two order wavelength hierarchy pyramid from lm to 3. 39l2um. The range of this system is up to 20m and the accuracy 5jim+l. 5*lO6L. ( L is the measured distance

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Zheng You, WeiMing Ren, and Jinwen Liang "Infrared multiwavelength He-Ne laser absolute distance interferometer for diameter measurement of large scale workpiece", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156262

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