Basic improvements in the pellicle final clean area

Donald M. Shernock; James Campi; Hector I. Garcia; Alan Golob

doi:10.1117/12.167260

15 February 1994 Basic improvements in the pellicle final clean area

Donald M. Shernock, James Campi, Hector I. Garcia, Alan Golob

Proceedings Volume 2087, 13th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.167260
Event: 13th Annual BACUS Symposium on Photomask Technology and Management, 1993, Santa Clara, CA, United States

Abstract

In order to assure that only defect free masks will reach Hoya Micro Mask's customers we need clean water, an excellent cleaning system and, of course, the means to inspect the mask for lingering particles and to certify that the product is defect free within the customer's specifications. We have designed our own original method for checking the QC Optics API- 3000/5, for accuracy, precision and sensitivity by depositing a group of metallic points using our Seiko FIB and evenly spreading polystyrene spheres of various sizes over our test mask. The depositions provided a vehicle for determining the precision of the API-3000/5 and establishing defect placement. The polystyrene spheres determine the inspection system's accuracy and limits of detection. We have added to our cleaning capability by working together with Convac-APT in the design of a new state-of-the-art standalone cleaning system and have solved many of our water problems by introducing a custom designed point-of-use water treatment system.

Citation Download Citation

Donald M. Shernock, James Campi, Hector I. Garcia, and Alan Golob "Basic improvements in the pellicle final clean area", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); https://doi.org/10.1117/12.167260

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