Surface-imaged silicon polymers for 193-nm excimer laser lithography

Roderick R. Kunz; Mark W. Horn; Russell B. Goodman; Patricia Anne Bianconi; David Alastair M Smith; J. R. Eshelman; Gregory M. Wallraff; Robert D. Miller; Eric J. Ginsburg

doi:10.1117/12.59738

1 June 1992 Surface-imaged silicon polymers for 193-nm excimer laser lithography

Roderick R. Kunz, Mark W. Horn, Russell B. Goodman, Patricia Anne Bianconi, David Alastair M Smith, J. R. Eshelman, Gregory M. Wallraff, Robert D. Miller, Eric J. Ginsburg

Author Affiliations +

Proceedings Volume 1672, Advances in Resist Technology and Processing IX; (1992) https://doi.org/10.1117/12.59738
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

A negative-tone surface-imaged resist process based upon the area-selective oxidation of silicon-backbone polymers is described. A bromine-based plasma is the resist developer, where the oxidized polymer inhibits the bromine-initiated etching to yield a negative-tone image. Using either polysilanes or polysilynes, resist sensitivities in the range of 50 mJ/cm2 have been obtained and resolutions to 0.2 micrometers achieved. Photosensitizers can be added to further accelerate the photo-oxidation, resulting in sensitivities less than 20 mJ/cm2. The latent image formation is reciprocal with respect to fluence in the range 0.05 to 1.5 mJ/cm2 per pulse and with respect to repetition rate. The photo-oxidation contrast is one, whereas the bromine-based etch step can have a contrast as high as 5. In addition, the exposure, focus, and development latitudes have all been characterized and compared to other surface-imaged 193 nm resist systems.

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Roderick R. Kunz, Mark W. Horn, Russell B. Goodman, Patricia Anne Bianconi, David Alastair M Smith, J. R. Eshelman, Gregory M. Wallraff, Robert D. Miller, and Eric J. Ginsburg "Surface-imaged silicon polymers for 193-nm excimer laser lithography", Proc. SPIE 1672, Advances in Resist Technology and Processing IX, (1 June 1992); https://doi.org/10.1117/12.59738

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