Polarization-independent high-efficiency two-dimensional metal-dielectric grating by frustum array

Yi-han Wang; Yu-da Chen; Jin Wang; Wei Jia; Chang-he Zhou

doi:10.1117/12.2687064

27 November 2023 Polarization-independent high-efficiency two-dimensional metal-dielectric grating by frustum array

Yi-han Wang, Yu-da Chen, Jin Wang, Wei Jia, Chang-he Zhou

Proceedings Volume 12768, Holography, Diffractive Optics, and Applications XIII; 127681U (2023) https://doi.org/10.1117/12.2687064
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

In the displacement measurement of the wafer stage of the lithography machine, the two-dimensional grating measurement system has attracted much attention because of its short optical path and less impact from the environmental disturbances. Meanwhile, the high-efficiency polarization-independent two-dimensional grating can not only reduce the Abbe error but also improve the signal accuracy. In this paper, we propose a reflective two-dimensional metal-dielectric grating with excellent polarization-independent and high diffraction efficiency. Calculated by rigorous coupled wave analysis (RCWA) , when the incident azimuth angle is 45°, the (-1, -1) order diffraction efficiencies of transverse electric polarization (TE) and transverse magnetic polarization (TM) are 95.6% and 94.9% at 632 nm incident wavelength under Littrow mounting, respectively. The diffraction efficiency equilibrium is 98.9%. The high efficiency of TE and TM polarization makes them have great application potential in 2D grating measurement system (GMS). Furthermore, the structure based on the frustum of a cone performs well in manufacturing tolerance, which provides possibility for practical applications.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yi-han Wang, Yu-da Chen, Jin Wang, Wei Jia, and Chang-he Zhou "Polarization-independent high-efficiency two-dimensional metal-dielectric grating by frustum array", Proc. SPIE 12768, Holography, Diffractive Optics, and Applications XIII, 127681U (27 November 2023); https://doi.org/10.1117/12.2687064

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Diffraction gratings

Diffraction

Polarization gratings

Optical gratings

Oxides

Silicon

Dielectric polarization

Show All Keywords

Keywords/Phrases

Search In:

Publication Years